High-Temperature Mass Flow Controller "5850EMH Series"
Proven long-term stability! We provide ultra-high purification performance for high-temperature applications.
The "5850EMH Series" is a high-temperature mass flow controller with a metal seal that ensures high leak integrity and allows for flexible application support. By combining various options, it achieves advanced high-temperature gas measurement and control. At the core of this product is a highly stable sensor that displays electronic output signals and flow rates. This signal is used for display, recording, and control without the need for an automatic zero adjustment circuit. 【Features】 ■ High leak integrity (10-11 Pa.m3/s (10-10 atm.cc/s) He or less) ■ Wide flow range (0.003 to 100 slpm) ■ High-purity VAR 316L stainless steel ■ Prevents particle generation ■ Helium leak check port *For more details, please refer to the related link page or feel free to contact us.
- Company：ITWジャパン
- Price：Other
